237-3663, SMC, SMC PFMV5 Series Flow Sensor for Dry Air, Gas, 0 l/min Min, 3 L/min Max, Brand SMC, Media Monitored Dry Air, Gas, Device Type Flow Sensor, Minimum Flow Rate 0 L/min SMC PFMV5 Series Flow Sensor for Dry Air, Gas, 0 l/min Min, 3 L/min Max